Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*; Nishikawa, Takeshi*

Proceedings of SPIE, Vol.9776, p.97762C_1 - 97762C_6, 2016/03

https://doi.org/10.1117/12.2219045

For the improvement of efficiency and output of the laser pumped plasma (LPP) extreme ultra-violet (EUV) light source, we present a hydrodynamics model of laser irradiated Sn targets. The model takes liquid/solid to gas transition and mixed phase condition of the flow into account for the calculation of the distribution of the particles produced by the pre-pulse laser irradiation and optimization of the EUV source. Firstly, we investigate the mechanisms of the fragmentation of the target and particle emission, including the effect of the equation of state of Sn, and secondly, an applicable model is proposed based on the analysis.